2/20/2013	12:11:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2013	12:11:59 PM	Recipe started at 12:11 PM
2/20/2013	12:11:59 PM	Helium valve closed
2/20/2013	12:11:59 PM	H2 valve closed
2/20/2013	12:11:59 PM	BCl3 valve closed
2/20/2013	12:11:59 PM	PH3 valve closed
2/20/2013	12:11:59 PM	SiCl4 pre valve closed
2/20/2013	12:11:59 PM	SiCl4 post valve closed
2/20/2013	12:11:59 PM	Main Vac valve closed
2/20/2013	12:11:59 PM	Bypass valve closed
2/20/2013	12:11:59 PM	Bubbler valve closed
2/20/2013	12:11:59 PM	Helium MFC set to  0.000000
2/20/2013	12:11:59 PM	H2 MFC set to  0.000000
2/20/2013	12:11:59 PM	BCl3 MFC set to  0.000000
2/20/2013	12:11:59 PM	PH3 MFC set to  0.000000
2/20/2013	12:11:59 PM	SiCl4 MFC set to  0.000000
2/20/2013	12:11:59 PM	Bypass solenoid MFC set to  0.000000
2/20/2013	12:11:59 PM	Tube furnace set to 0
2/20/2013	12:12:02 PM	H2 valve closed
2/20/2013	12:12:02 PM	BCl3 valve closed
2/20/2013	12:12:02 PM	PH3 valve closed
2/20/2013	12:12:02 PM	SiCl4 pre valve closed
2/20/2013	12:12:02 PM	SiCl4 post valve closed
2/20/2013	12:12:02 PM	Main Vac valve closed
2/20/2013	12:12:02 PM	Bypass valve closed
2/20/2013	12:12:02 PM	Bubbler valve closed
2/20/2013	12:12:02 PM	Helium valve opened
2/20/2013	12:12:02 PM	Helium MFC set to  500.000000
2/20/2013	12:12:02 PM	H2 MFC set to  0.000000
2/20/2013	12:12:02 PM	BCl3 MFC set to  0.000000
2/20/2013	12:12:02 PM	PH3 MFC set to  0.000000
2/20/2013	12:12:02 PM	SiCl4 MFC set to  0.000000
2/20/2013	12:12:02 PM	Bypass solenoid MFC set to  0.000000
2/20/2013	12:12:02 PM	Tube furnace set to 0
2/20/2013	12:13:15 PM	Helium valve closed
2/20/2013	12:13:15 PM	H2 valve closed
2/20/2013	12:13:15 PM	BCl3 valve closed
2/20/2013	12:13:15 PM	PH3 valve closed
2/20/2013	12:13:15 PM	SiCl4 pre valve closed
2/20/2013	12:13:15 PM	SiCl4 post valve closed
2/20/2013	12:13:15 PM	Main Vac valve closed
2/20/2013	12:13:15 PM	Bypass valve closed
2/20/2013	12:13:15 PM	Bubbler valve closed
2/20/2013	12:13:15 PM	Helium MFC set to  0.000000
2/20/2013	12:13:15 PM	H2 MFC set to  0.000000
2/20/2013	12:13:15 PM	BCl3 MFC set to  0.000000
2/20/2013	12:13:15 PM	PH3 MFC set to  0.000000
2/20/2013	12:13:15 PM	SiCl4 MFC set to  0.000000
2/20/2013	12:13:15 PM	Bypass solenoid MFC set to  0.000000
2/20/2013	12:13:15 PM	Tube furnace set to 0
2/20/2013	12:13:16 PM	Run finished at 12:13 PM
2/20/2013	12:13:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/20/2013	12:35:32 PM	Bypass valve opened
2/20/2013	12:38:01 PM	Main Vac valve opened
2/20/2013	12:38:02 PM	Bypass valve closed
2/20/2013	12:38:46 PM	Recipe started at 12:38 PM
2/20/2013	12:38:46 PM	Helium valve closed
2/20/2013	12:38:46 PM	H2 valve closed
2/20/2013	12:38:46 PM	BCl3 valve closed
2/20/2013	12:38:46 PM	PH3 valve closed
2/20/2013	12:38:46 PM	SiCl4 pre valve closed
2/20/2013	12:38:46 PM	SiCl4 post valve closed
2/20/2013	12:38:46 PM	Bypass valve closed
2/20/2013	12:38:46 PM	Bubbler valve closed
2/20/2013	12:38:46 PM	Main Vac valve opened
2/20/2013	12:38:46 PM	Helium MFC set to  0.000000
2/20/2013	12:38:46 PM	H2 MFC set to  0.000000
2/20/2013	12:38:46 PM	BCl3 MFC set to  0.000000
2/20/2013	12:38:46 PM	PH3 MFC set to  0.000000
2/20/2013	12:38:46 PM	SiCl4 MFC set to  0.000000
2/20/2013	12:38:46 PM	Bypass solenoid MFC set to  0.000000
2/20/2013	12:38:46 PM	Tube furnace set to 150
2/20/2013	12:39:16 PM	H2 valve closed
2/20/2013	12:39:16 PM	BCl3 valve closed
2/20/2013	12:39:16 PM	PH3 valve closed
2/20/2013	12:39:17 PM	SiCl4 pre valve closed
2/20/2013	12:39:17 PM	SiCl4 post valve closed
2/20/2013	12:39:17 PM	Bypass valve closed
2/20/2013	12:39:17 PM	Bubbler valve closed
2/20/2013	12:39:17 PM	Helium valve opened
2/20/2013	12:39:17 PM	Main Vac valve opened
2/20/2013	12:39:17 PM	Helium MFC set to  20.000000
2/20/2013	12:39:17 PM	H2 MFC set to  0.000000
2/20/2013	12:39:17 PM	BCl3 MFC set to  0.000000
2/20/2013	12:39:17 PM	PH3 MFC set to  0.000000
2/20/2013	12:39:17 PM	SiCl4 MFC set to  0.000000
2/20/2013	12:39:17 PM	Bypass solenoid MFC set to  0.000000
2/20/2013	12:39:17 PM	Tube furnace set to 150
2/20/2013	12:39:47 PM	Helium valve closed
2/20/2013	12:39:47 PM	H2 valve closed
2/20/2013	12:39:47 PM	BCl3 valve closed
2/20/2013	12:39:47 PM	PH3 valve closed
2/20/2013	12:39:47 PM	SiCl4 pre valve closed
2/20/2013	12:39:47 PM	SiCl4 post valve closed
2/20/2013	12:39:47 PM	Bypass valve closed
2/20/2013	12:39:47 PM	Bubbler valve closed
2/20/2013	12:39:47 PM	Main Vac valve opened
2/20/2013	12:39:47 PM	Helium MFC set to  0.000000
2/20/2013	12:39:47 PM	H2 MFC set to  0.000000
2/20/2013	12:39:47 PM	BCl3 MFC set to  0.000000
2/20/2013	12:39:47 PM	PH3 MFC set to  0.000000
2/20/2013	12:39:47 PM	SiCl4 MFC set to  0.000000
2/20/2013	12:39:47 PM	Bypass solenoid MFC set to  0.000000
2/20/2013	12:39:47 PM	Tube furnace set to 150
